Quick measurement in the UV/VIS range 250 - 1100nm with motor spectrometer (monochromator)
Optional extension of spectral range into the NIR (700 - 1700nm) or (700 - 2300nm)
Optional extension of UV-VIS range (190 - 1100nm)
Transmission and variable angle reflection
Rotating polarizer provides accurate measurement of any polarization state
Step scan analyzer for high speed and low noise acquisition
Variable angle from 20-90° automated angle with 20-90° is also available
Vertical sample stage
Fast determination of thickness and refractive index of single or multi-layed samples
Broad range of Psi and Delta data are measured automatically and fitted through the PHE-103 ellipsometry software
PHE-103 ellipsometer software is the most comprehensive program available for data acquisition and analysis. It combines state-of-the-art mathematical fitting algorithms with a large selection of modeling options for fast and accurate data analysis. An advanced spectroscopic ellipsometry software
Built in library of material properties, includes several hundreds of material models
Mixtures of new materials are possible using known material properties
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